Open AccessArticle Electrically Tunable Meta-Waveplate Enabled by Sb 2Se 3-Heterogeneously Integrated Piezoelectric MEMS Mirror by Jianing Li Jianing Li SciProfiles Scilit Preprints.org Google Scholar 1, Rujun Zhou Rujun Zhou SciProfiles Scilit Preprints.org Google Scholar 1,2, Ji Wang Ji Wang SciProfiles Scilit Preprints.org Google Scholar 1,2, Peishuai Wang Peishuai Wang SciProfiles Scilit Preprints.org Google Scholar 1,2, Chenning Tao Chenning Tao SciProfiles Scilit Preprints.org Google Scholar 1,2, Si Luo Si Luo SciProfiles Scilit Preprints.org Google Scholar 1,2, Yusheng Zhang Yusheng Zhang SciProfiles Scilit Preprints.org Google Scholar Yusheng Zhang is an Associate Professor at the Hangzhou Institute of Advanced Studies, Zhejiang He a [...] Read more 1,2, Bin Zhang Bin Zhang SciProfiles Scilit Preprints.org Google Scholar 1,2, Mingwei Tang Mingwei Tang SciProfiles Scilit Preprints.org Google Scholar 3, Yadong Deng Yadong Deng SciProfiles Scilit Preprints.org Google Scholar 1,2,*, Zhangwei Yu Zhangwei Yu SciProfiles Scilit Preprints.org Google Scholar 1,2,* and Daru Chen Daru Chen SciProfiles Scilit Preprints.org Google Scholar 1,2 1 College of Physics and Electronic Information Engineering, Zhejiang Normal University, Jinhua 321004, China 2 Hangzhou Institute of Advanced Studies, Zhejiang Normal University, Hangzhou 311231, China 3 State Key Laboratory of Extreme Photonics and Instrumentation, Zhejiang Key Laboratory of Autonomous Optoelectronic Perception, College of Optical Science and Engineering, Zhejiang University, Hangzhou 310027, China * Authors to whom correspondence should be addressed. Micromachines 2026, 17(6), 704; https://doi.org/10.3390/mi17060704 (registering DOI) Submission received: 15 April 2026 / Revised: 30 May 2026 / Accepted: 5 June 2026 / Published: 8 June 2026 Abstract Metasurfaces have emerged as a powerful platform for subwavelength light manipulation, attracting widespread interest for their potential to replace bulky optical components. However, most metasurfaces are statically designed with fixed functionalities. Here, we demonstrate a high-efficiency tunable meta-waveplate by heterogeneously integrating a phase-change Sb 2Se 3 layer with a piezoelectric MEMS mirror. Leveraging the reversible amorphous–crystalline transition of Sb 2Se 3, combined with MEMS-enabled nanoscale air gap tuning, the metasurface achieves dynamic switching among zero-, half-, and quarter-waveplate functionalities at the communication wavelength of 1550 nm. The device exhibits stable polarization conversion performance under various rotation angles. Furthermore, we developed a nano-quarter-waveplate library on this platform, which provides extensive phase control over the reflected field and enables programmable beam deflection. This tunable architecture opens new avenues for adaptive photonics with dynamically switchable functionalities. 1. Introduction Polarization, a fundamental property of light characterizing the directional oscillation of its transverse electric field, is independent of frequency, phase, and amplitude [ 1]. This independence provides an essential degree of freedom for enhanced multiplexing, making precise polarization control critical in nonlinear optics [ 2], advanced imaging [ 3], and quantum optics [ 4]. Conventional birefringent waveplates, however, rely on propagation-length-dependent phase accumulation within anisotropic crystals to generate phase retardation, necessitating macroscopic optical path lengths [ 5, 6]. Such geometric constraints severely limit device miniaturization, directly contradicting integration demands in these fields. Optical metasurfaces—planar arrays of subwavelength resonant nanostructures [ 7, 8, 9, 10, 11, 12, 13, 14, 15, 16]—offer a disruptive solution. Their ultrathin profile and exceptional ability to precisely manipulate scattered light fields, including polarization, effectively address the stringent scaling requirements of modern photonics. Building on this, metasurface waveplates uniquely combine ultracompact footprints, adaptive polarization transformations, and multifunctional operations [ 17, 18, 19, 20], enabling applications from polarization-multiplexed imaging [ 21, 22, 23] to quantum light sources [ 24, 25]. Despite significant advances, most metasurface waveplates remain fundamentally static—their polarization functionalities permanently encoded in fixed nanostructures, severely limiting adaptability in intelligent photonic systems requiring dynamic polarization control. Current research pursues dynamic tuning via electrical [ 26, 27], optical [ 28], mechanical [ 29, 30, 31], phase-change [ 32, 33, 34], and chemical stimuli [ 35]. Among these approaches, piezoelectric Micro-Electro Mechanical System (MEMS) platforms uniquely achieve sub-millisecond reconfiguration through hybrid plasmonic Fabry-Pérot (FP) cavities formed by integrating metasurfaces on glass with thin-film MEMS mirrors [ 36, 37, 38, 39, 40]. Recent studies have combined materials such as liquid crystals or VO 2 with mechanically tunable metasurfaces, demonstrating that synergy at the material and structural levels can achieve a performance surpassing that of any single mechanism [ 41, 42]. However, existing single- and bi-layer metasurface [ 43, 44] designs critically overlook the transformative potential of a key innovation: heterogeneously integrating functional multilayer films (e.g., phase-change material Sb 2Se 3) directly onto the MEMS mirrors themselves. This co-integration paradigm significantly enhances nanophotonic functionality-density through monolithic consolidation of non-volatile switching, spectral phase engineering, and polarization manipulation within an ultracompact architecture. By enabling simultaneous multi-parameter control and a substantial reduction in reliance on traditional cascaded components, it establishes a new paradigm for electrically tunable meta-waveplates that unify multifunctional integration with sub-wavelength compactness. 2. Results and Discussion Figure 1 illustrates the operating principle of the proposed TMMW device. As depicted in Figure 1a,b, the device adopts a heterogeneously integrated architecture, in which a MEMS mirror coated with an SiO 2–Sb 2Se 3–SiO 2 multilayer is adhesively bonded to a glass substrate patterned with a metasurface. The MEMS mirror is driven by a lead zirconate titanate (PZT) piezoelectric thin-film actuator integrated beneath the mirror surface. Dynamic modulation is realized through piezoelectric adjustment of the interfacial air gap Ta, controlled by an applied modulation voltage Vm [ 36, 37, 38, 39, 40]. The phase state of the phase-change material Sb 2Se 3 can be reversibly controlled using an electrothermal phase-control scheme. The Joule heating generated by applied electrical pulses induces a phase transition between the crystalline and amorphous states. When Sb 2Se 3 is in the amorphous state, progressively increasing Ta induces sequential polarization transformations in the reflected light. Specifically, incident left-handed circularly polarized (LCP, | l >) light first maintains its original polarization state, then to −45° linearly polarized (LP, | lp(−45°) >) light, and finally reverts to right-handed circularly polarized (RCP, | r >) light. This progression corresponds to the ZWP, QWP, and HWP operational modes, respectively ( Figure 1c–e). The analysis takes into account the reversed propagation direction of electromagnetic waves under reflection-mode operation. After switching the Sb 2Se 3 thin film to its crystalline state [ 33, 48, 49], the TMMW exhibits similar polarization modulation behavior as the cavity length Ta is progressively reduced ( Figure 1f–h). Notably, at a fixed Ta of 250 nm, on-demand switching between QWP and HWP modes is achieved by reversibly modulating the phase state of the Sb 2Se 3 layer ( Figure 1d,g). From a microscopic perspective, the optical reflective response of the proposed TMMW unit-cell, with its principal axes aligned along the x- and y-directions, can be fully described by its Jones matrix representation: R = ( r x x 0 0 r y y ) , (1) where the complex reflection coefficients r x x = | r x x | e i δ x x and r y y = | r y y | e i δ y y correspond to x- and y-polarized excitations, respectively, with their amplitudes | r x x | and | r y y | , and phase delays δ x x and δ y y , primarily determined by the geometric parameters of the cross-shaped gold meta-atom along these orthogonal axes ( Figure 1a,b). When the reflection amplitudes are equal (i.e., | r x x | = | r y y | ) and the relative phase difference Δ δ = δyy − δxx = ±90° or 180°, the TMMW unit-cell operates ideally as a nano-QWP or a nano-HWP. To ensure high reflection efficiency and provide sufficient resonance phase coverage at the design wavelength of 1550 nm, the unit-cell parameters are set as [ h1, h2, h3, h4, P, w] = [50 nm, 20 nm, 100 nm, 130 nm, 500 nm, 50 nm]. Three-dimensional (3D) full-wave simulations were conducted using Finite Element Method, with a parametric sweep over the dimensions Lx and Ly of the top gold meta-atom to obtain the complex reflection coefficients under x- and y-polarized excitations. The TMMW unit-cell is illuminated by normally incident x- or y-polarized plane waves, with periodic boundary conditions applied in both the x- and y-directions. The periodicity P of the TMMW unit-cell is set to 500 nm, which is much smaller than the design wavelength of λ = 1550 nm, thereby suppressing higher-order diffraction. A glass domain is introduced above the meta-atom and truncated with a perfectly matched layer to avoid any reflection. The relative permittivity of gold is modeled using the Drude model fitted with experimental data [ 50], while SiO 2 is considered as a lossless material with a constant refractive index of 1.46. Moreover, the measured refractive indices of Sb 2Se 3 in the amorphous and crystalline states are 3.306 and 4.3281 + 0.000021i, respectively, at the target wavelength of 1550 nm [ 49]. In the simulations, the wavelength-dependent n( λ), k( λ) data from the same reference [ 49] are used over the 1500–1600 nm range. Figure 2 presents the simulated reflection amplitude and phase distributions of the TMMW unit-cell under x-polarized excitation for both amorphous and crystalline states across varying air gap Tₐ, with results directly corresponding to the schematic illustrations in Figure 1c–h. Systematic parameter sweeps were performed on the meta-atom dimensions ( Lx and Ly), ranging from 40 nm to 480 nm with a 20 nm step size, while maintaining fixed values for all remaining structural parameters. After parametric optimization, the cross-shaped meta-atom’s final dimensions were established at Lx = 425 nm and Ly = 302 nm, as marked by the red hexagon symbols in Figure 2. Figure 3 presents the wavelength-dependent reflection amplitudes ( | r x x | and | r y y | ) and the relative phase difference (Δ δ) under x- and y-polarized illumination, demonstrating tunable performance across both amorphous and crystalline phases at varying air gap values. At the design wavelength of 1550 nm, the amorphous Sb 2Se 3 structure demonstrates reconfigurable waveplate functionality, exhibiting QWP operation with | r x x | = 0.858, | r y y | = 0.888, and Δ δ = 90.39° at Ta = 250 nm, and transitioning to HWP operation with | r x x | = 0.849, | r y y | = 0.895, and Δ δ = 179.66° when Ta increases to 380 nm ( Figure 3a,b). Similarly, in the crystalline state, the structure exhibits HWP functionality with | r x x | = 0.849, | r y y | = 0.924, and Δ δ = −179.47° at Ta = 250 nm, and transitions to QWP operation with | r x x | = 0.865, | r y y | = 0.939, and Δ δ = 91° when Ta is reduced to 120 nm ( Figure 3c,d). Furthermore, | r x x | and | r y y | remain consistently above 0.8 within the wavelength range of 1500 to 1600 nm, regardless of the phase state of Sb 2Se 3. The relative phase differences Δ δ are observed to be very close to ±180° for the HWP and 90° for the QWP. This highlights the functional transition from HWP to QWP for the designed TMMW device, with a broad operating bandwidth of approximately 100 nm centered at 1550 nm. For further evaluation of the performance of the designed TMMW device, three key polarization parameters of reflected lights are analyzed: the degree of linear polarization (DoLP), degree of circular polarization (DoCP), and angle of linear polarization (AoLP), all derived from Stokes parameters ( S 0 S 1 S 2 S 3 ) [ 51]: D o L P = ( S 1 2 + S 2 2 ) / S 0 , (2) D o C P = S 3 / S 0 , (3) A o L P = t a n − 1 ( S 2 / S 1 ) / 2 . (4) Figure 4 presents polarization characteristics of the reflected light under LCP and RCP excitations across the 1500–1600 nm wavelength range, comparing Sb 2Se 3 in amorphous and crystalline states under respective air gap configurations. For QWP operation ( Figure 4a,d), DoLP and AoLP are shown, whereas for HWP operation ( Figure 4b,c), DoLP and DoCP are presented. In the QWP mode-realized with amorphous Sb 2Se 3 at Ta = 250 nm ( Figure 4a) or crystalline Sb 2Se 3 at Ta = 120 nm ( Figure 4d)—the device efficiently converts incident LCP and RCP light into −45° and +45° linearly polarized light, respectively. The DoLP remains above 0.90 throughout the spectral range, reaching approximately 1 at 1550 nm, indicating high linear polarization purity. In the HWP mode—achieved with amorphous Sb 2Se 3 at Ta = 380 nm ( Figure 4b) or crystalline Sb 2Se 3 at Ta = 250 nm ( Figure 4c)—the reflected beams exhibit near-ideal circular polarization conversion, with DoCP values approaching −1 and +1 under LCP and RCP excitation, respectively. The corresponding DoLP remains low, below 0.271, over the entire wavelength range. The optical performance of the TMMW is further quantified in terms of reflectance and conversion efficiency, defined as the intensity ratio of reflected to incident light and the ratio of light converted into the target polarization state to the incident light, respectively. As summarized in Figure 5, under all four operational configurations, both reflectance and conversion efficiency consistently exceed 69.0%, with peak values surpassing 82.1%. At the target wavelength of 1550 nm, the reflectance and conversion efficiency are closely matched, showing a relative deviation of less than 0.4%. Across the entire 1500–1600 nm band, the deviation remains below 4%, underscoring the robust and consistent polarization conversion performance of the TMMW in both HWP and QWP modes. When the meta-atom satisfying Δ δ = 90° is rotated by an angle θ with respect to the x -axis, the corresponding Jones matrix is given by: J ( θ ) = | r x x | e i δ x x M − 1 ( θ ) ( 1 0 0 i ) M ( θ ) , (5) where M ( θ ) = ( c o s θ s i n θ − s i n θ c o s θ ) represents the rotation matrix. For the LCP incident light with E i n = 1 2 ( 1 i ) , with AoLP given by θ − π/4: E o u t = | r x x | e i δ x x e i θ ( c o s ( θ − π 4 ) s i n ( θ − π 4 ) ) , (6) Similarly, for a meta-atom with Δ δ = 180°, the Jones matrix becomes: J ( θ ) = | r x x | e i δ x x M − 1 ( θ ) ( 1 0 0 − 1 ) M ( θ ) . (7) In this case, under LCP incidence, the output is RCP: E o u t = 2 2 | r x x | e i δ x x e i 2 θ ( 1 − i ) . (8) Figure 6 presents the DoLP and AoLP of the reflected beam from the QWP, and the DoLP and DoCP from the HWP, as functions of the in-plane rotation angle at λ = 1550 nm. The AoLP varies linearly with the rotation angle ( Figure 6a,d), confirming the orientation-independent behavior of the designed QWP. When operating as an HWP, the DoCP of the reflected beam shows only minor fluctuations, with a minimum around 45°, yet remains above 0.852 across all angles ( Figure 6b,c). These results demonstrate that the metasurface maintains stable polarization conversion performance under rotation, highlighting its versatility for implementing complex optical functions. To achieve synchronous and independent phase modulation of co- and cross-polarized reflected waves in the CP basis, we designed new metasurfaces based on the original structure for beam steering applications. Equation (6) indicates that the LP output acquires an additional phase term δxx + θ. At the same time, the LP light can be decomposed into two CP components as follows: E o u t = 1 2 | r x x | e i ( δ x x + π 4 ) ( 1 i ) + 1 2 | r x x | e i ( δ x x − π 4 ) e i 2 θ ( 1 − i ) . (9) As expressed in Equation (9), the reflected field consists of two components: a co-polarized wave retaining the helicity of the incident LCP light, and a cross-polarized wave with the reversed helicity. Their reflection coefficients in the circular basis are defined as: r c o = 2 2 | r x x | e i ( δ x x + π 4 ) and r c r = 2 2 | r x x | e i ( δ x x − π 4 + 2 θ ) . The co-polarized phase δ co = δ x x + π 4 depends solely on the resonance phase, while the cross-polarized phase δ cr = δ x x − π 4 + 2 θ is governed by both the resonance phase and the geometric phase, associated with the meta-atom’s dimensions and orientation, respectively. This enables independent manipulation of the co- and cross-polarized circular polarization channels. To validate independent beam steering in two orthogonal CP channels, we designed two gradient metasurfaces (MS1 and MS2) that spatially separate the reflected CP beams. The phase gradients governing the beam steering are given by: d δ c o d x = ∂ ( δ x x ( x , y ) + π 4 ) ∂ x = Δ δ x x N ⋅ P = m c o ⋅ 2 π Λ s c , (10) d δ c r d x = ∂ ( δ x x ( x , y ) − π 4 + 2 ⋅ θ ( x , y ) ) ∂ x = Δ δ x x + 2 ⋅ Δ θ N ⋅ P = m c r o s s ⋅ 2 π Λ s c . (11) Here, θ( x, y) denotes the orientation angle of each meta-atom, Δ θ is the relative rotation between adjacent meta-atoms, Λ s c represents the total period of one supercell, and mco and mcross are the diffraction orders for the co- and cross-polarized reflected fields, respectively. As a representative case, using the model parameters derived from Figure 2e (with Sb 2Se 3 in the crystalline state and Ta of 250 nm), we performed a parametric sweep of Lx and Ly of the gold cross structures. This analysis yielded the calculated reflection coefficient as a function of the nano-antenna dimensions at the design wavelength of 1550 nm under x-polarized illumination. As shown in Figure 7a, the contours corresponding to a phase difference of Δ δ = 90° are marked with black solid lines, identifying candidate structures for nano-QWPs. Furthermore, the achievable resonance phase of these nano-QWPs spans a wide range of up to 270°. To ensure broad operational bandwidth and high conversion efficiency, we selected four nano-QWPs (marked by hexagonal stars) exhibiting a phase step of Δ δxx = 90° to constitute a meta-atom library. Figure 7b shows the reflection amplitudes and phases of four selected nano-QWPs (element #1 to #4) with a resonance phase step of Δ δxx = 90° at 1550 nm, which ensure simultaneous circular-to-linear polarization conversion and potential wavefront shaping. For MS1, LCP incident light is directed into the co-polarized (LCP, m = 0) and cross-polarized (RCP, m = +1) diffraction channels (with Sb 2Se 3 in the crystalline state and Ta of 250 nm), as illustrated in Figure 7c. Setting mco = 0, mcross = 1, and N = 2 yields the solutions Δ δxx = 0° and Δ θ = π/4, realized using an 8-element supercell. We selected Meta-atom No.1 from the nano-QWP library due to its high reflection efficiency and arranged the supercell with orientation angles θ( x, y) of 90°, 90°, 135°, 135°, 180°, 180°, 225°, and 225°, respectively. The elements are spaced at a period of P = 500 nm ( Figure 7c). As shown solid lines in Figure 7d, nearly all LCP incident light is diffracted into the 0th and +1st orders, with the −1st order strongly suppressed—attributed to the broadband nature of the geometric phase. The simulated diffraction efficiencies reach ~71% and ~19% for the 0th and +1st orders, respectively, at 1550 nm. This confirms the effective spatial separation of orthogonal CP channels. The polarization states of the diffracted beams, analyzed as a function of analyzer angle (solid lines in Figure 7e), exhibit nearly ideal circular distributions, further verifying polarization purity in both output channels. Conversely, when Sb 2Se 3 is switched to the amorphous state (with Ta unchanged), the predefined beam steering functionality is no longer preserved, thereby demonstrating the potential of our TMMW design for information encryption and decryption (dash lines in Figure 7d,e). By synergizing resonant and geometric phases, MS2 (crystalline Sb 2Se 3, Ta = 250 nm) is designed to direct co- and cross-polarized waves into the −1st and +1st diffraction orders, respectively. Substituting mco = −1, mcross = 1, and N = 2 into Equations (10) and (11) leads to an 8-element supercell with the meta-atom sequence [No.3, No.3, No.2, No.2, No.1, No.1, No.4, No.4] and rotation angles [0°, 0°, 90°, 90°, 180°, 180°, 270°, 270°] ( Figure 8a). The simulated results (solid lines, Figure 8b) show that most incident LCP light is diffracted into the target orders, with efficiencies of ~37% (−1st) and ~30% (+1st) at 1550 nm. Furthermore, the nearly circular polarization distributions of these orders ( Figure 8c, solid lines) verify successful polarization control in spatially separated channels. Notably, this beam steering functionality is also disrupted when Ta is switched to 500 nm, even with Sb 2Se 3 remaining crystalline. 3. Conclusions In summary, we have realized a TMMW device for the near-infrared by heterogeneously integrating a phase-change Sb 2Se 3 film with a piezoelectric MEMS mirror. This platform enables dynamic and reversible switching between HWP and QWP operations at 1550 nm, with robust polarization conversion performance maintained over a wide range of rotation angles. Furthermore, we established a nano-QWP library supporting a resonance phase shift exceeding 270°, which facilitates efficient circular-to-linear polarization conversion alongside extensive phase manipulation of the reflected wavefront. By strategically combining this resonant phase with the geometric phase, we demonstrated metasurfaces that achieve programmable beam deflection in both co- and cross-polarized channels under circular polarization. This heterogeneously integrated architecture represents a significant advancement for adaptive meta-optics, establishing a versatile pathway toward dynamically reconfigurable and highly compact photonic systems. Author Contributions Conceptualization, Y.D. and J.L.; methodology, Y.D. and J.L.; software, J.L., Y.D., R.Z. and J.W.; validation, J.L. and Y.D.; formal analysis, J.L. and Y.D.; investigation, J.L., Y.D., R.Z., J.W. and P.W.; resources, J.L. and Y.D.; data curation, J.L. and Y.D.; writing—original draft preparation, J.L. and Y.D.; writing—review and editing, Y.D., J.L., C.T., S.L., Y.Z., B.Z., M.T., Z.Y. and D.C.; visualization, J.L. and Y.D.; supervision, Y.D. and Z.Y.; project administration, Y.D., Z.Y. and D.C. All authors have read and agreed to the published version of the manuscript. Funding This research was funded by the National Natural Science Foundation of China (Grant No. 62505286, No. 62205296, No. 62505284, No. 62305299, No. 62405280, and No. 42575146), the Baima Lake Laboratory Joint Fund of the Zhejiang Provincial Natural Science Foundation of China (Grant No. LBMHZ25F050002), and the Jinhua Science and Technology Plan Project (Grant No. 2026-3-002). Institutional Review Board Statement Not applicable. Informed Consent Statement Not applicable. Data Availability Statement The original contributions presented in this study are included in the article. Further inquiries can be directed to the corresponding authors. Conflicts of Interest The authors declare no conflicts of interest. References Disclaimer/Publisher’s Note: The statements, opinions and data contained in all publications are solely those of the individual author(s) and contributor(s) and not of MDPI and/or the editor(s). MDPI and/or the editor(s) disclaim responsibility for any injury to people or property resulting from any ideas, methods, instructions or products referred to in the content. © 2026 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license. Li, J.; Zhou, R.; Wang, J.; Wang, P.; Tao, C.; Luo, S.; Zhang, Y.; Zhang, B.; Tang, M.; Deng, Y.; et al. Electrically Tunable Meta-Waveplate Enabled by Sb 2Se 3-Heterogeneously Integrated Piezoelectric MEMS Mirror. Micromachines 2026, 17, 704. https://doi.org/10.3390/mi17060704 Li J, Zhou R, Wang J, Wang P, Tao C, Luo S, Zhang Y, Zhang B, Tang M, Deng Y, et al. Electrically Tunable Meta-Waveplate Enabled by Sb 2Se 3-Heterogeneously Integrated Piezoelectric MEMS Mirror. Micromachines. 2026; 17(6):704. https://doi.org/10.3390/mi17060704 Li, Jianing, Rujun Zhou, Ji Wang, Peishuai Wang, Chenning Tao, Si Luo, Yusheng Zhang, Bin Zhang, Mingwei Tang, Yadong Deng, and et al. 2026. "Electrically Tunable Meta-Waveplate Enabled by Sb 2Se 3-Heterogeneously Integrated Piezoelectric MEMS Mirror" Micromachines 17, no. 6: 704. https://doi.org/10.3390/mi17060704 Li, J., Zhou, R., Wang, J., Wang, P., Tao, C., Luo, S., Zhang, Y., Zhang, B., Tang, M., Deng, Y., Yu, Z., & Chen, D. (2026). Electrically Tunable Meta-Waveplate Enabled by Sb 2Se 3-Heterogeneously Integrated Piezoelectric MEMS Mirror. Micromachines, 17(6), 704. https://doi.org/10.3390/mi17060704
Electrically Tunable Meta-Waveplate Enabled by Sb2Se3-Heterogeneously Integrated Piezoelectric MEMS Mirror
